Smart miniaturized systems in demanding applications from biological and medical to power, optical and automotive electronics are based on sensing and actuation by micro- and nanoelectromechancial systems (MEMS/NEMS). While currently MEMS functional structures are made of silicon, the diversification of applications, demand for new functionalities and higher integration density coupled with the requirement of low power consumption provides an opportunity to explore new and innovative integration strategies in the design of MEMS, BioMEMS and MOEMS.